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Polyvinylpyrrolidones (PVPs): Switchable Leveler Additives for Damascene Applications

Type of publication Peer-reviewed
Publikationsform Original article (peer-reviewed)
Publication date 2013
Author Hai N. T. M., Furrer J., Stricker F., Huynh T. M. T., Gjuroski I., Luedi N., Brunner T., Weiss F., Fluegel A., Arnold M., Chang I., Mayer D., Broekmann P.,
Project New concepts for the 3D-TSV electroplating: From the tailored design to the application of suppressor additives
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Original article (peer-reviewed)

Journal Journal of The Electrochemical Society
Volume (Issue) 160(12)
Page(s) 3116 - 3125
Title of proceedings Journal of The Electrochemical Society
DOI 10.1149/2.019312jes

Abstract

The electroplating characteristics of polyvinylpyrrolidones (PVPs) have been studied by means of potential/time transients, secondary ion mass spectroscopy (SIMS depth profiling) and NMR methods. Our results identify the PVPs as a class of Cu plating additives whose mode of leveler action can be controlled (switched on/off) by the current density. At low current densities the PVPs show identical synergistic effects with chloride and similar antagonistic effects with SPS (bis-(sodium-sulfopropyl)-disulfide) as known from the PAGs (polyalkylene glycols). In particular the SPS loses its depolarizing capability at higher current densities. The dominance of non-specific interactions of the PVPs with the copper surface is identified as origin for the leveling capability of PVPs at these higher current densities. The transition from an antagonistic (no leveling) to a non-antagonistic (leveling) PVP/SPS interplay is demonstrated to be depending on the molecular weight of the PVPs.
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