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Piezoresistive microchanneled SU-8 cantilevers using silver nanowires for increased detection sensitivity toward an automated multipipette tool

English title Piezoresistive microchanneled SU-8 cantilevers using silver nanowires for increased detection sensitivity toward an automated multipipette tool
Applicant Zambelli Tomaso
Number 165651
Funding scheme Project funding
Research institution Institut für Biomedizinische Technik Universität Zürich und ETHZ
Institution of higher education ETH Zurich - ETHZ
Main discipline Other disciplines of Engineering Sciences
Start/End 01.04.2016 - 31.03.2019
Approved amount 216'008.00
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Keywords (5)

SU-8; AFM microchanneled cantilevers; silver nanowires; self sensing; microfabrication

Lay Summary (Italian)

Lead
Un sistema dotato di ritorno di forza sarà realizzato basandosi sulla microfabbricazione di cantilever per microscopio a scansione a forza atomica utilizzando la conviviale resina SU-8 e sfruttando l'effetto piezoresistivo per il rilevamento della flessione del cantilever.
Lay summary

Obiettivi principali

Il ritorno di forza permette di instaurare un contatto garbato tra una punta e una superficie. Ci siamo prefissati la microfabbricazione di pipette in resina polimerica (per renderle piú malleabili), la cui flessione durante l'accostamento con una superficie sia rigida sia soffice è rilevata misurando la differenza di resistenza di un elettrodo appositamente depositato sulle pareti esterne della pipetta stessa.

Con il fine di accrescere la sensitività dell strumento esploreremo l'utilizzo di nuovi materiali nanocompositi come i nanofili d'argento per la fabbricazione dell'elettrodo.

Il rilevamento attraverso misura elettrica consentirà l'assemblaggio di tre pipette indipendenti in un solo sistema automatico.

Come dimostrazione del buon funzionamento, ci proponiamo di costruire un transistor bidimensionale utilizzando tre differenti materiali nanocompositi ciascuno con una distinta proprietà elettrica e ciascuno caricato in una delle tre pipette.

Contesto generale

La realizzazione di un tale strumento multipipette aprirà nuovi orizzonti nel campo della scienza dei materiali (concezione di nuovi metamateriali con specifiche proprietà meccaniche, magnetiche ed elettroniche) come pure nel campo della biologia (chirurgia seriale di una singola cellula scelta in vitro.)

Direct link to Lay Summary Last update: 19.04.2016

Responsible applicant and co-applicants

Employees

Name Institute

Publications

Publication
Combined Ion Conductance and Atomic Force Microscope for Fast Simultaneous Topographical and Surface Charge Imaging
Dorwling-Carter Livie, Aramesh Morteza, Han Hana, Zambelli Tomaso, Momotenko Dmitry (2018), Combined Ion Conductance and Atomic Force Microscope for Fast Simultaneous Topographical and Surface Charge Imaging, in Analytical Chemistry, 90(19), 11453-11460.
Force controlled SU-8 micropipettes fabricated with a sideways process
Han Hana, Martinez Vincent, Aebersold Mathias J, Lüchtefeld Ines, Polesel-Maris Jérôme, Vörös János, Zambelli Tomaso (2018), Force controlled SU-8 micropipettes fabricated with a sideways process, in Journal of Micromechanics and Microengineering, 28(9), 095015-095015.
Local Chemical Stimulation of Neurons with the Fluidic Force Microscope (FluidFM)
Aebersold Mathias J., Dermutz Harald, Demkó László, Cogollo José F. Saenz, Lin Shiang-Chi, Burchert Conrad, Schneider Moritz, Ling Doris, Forró Csaba, Han Hana, Zambelli Tomaso, Vörös János (2018), Local Chemical Stimulation of Neurons with the Fluidic Force Microscope (FluidFM), in ChemPhysChem, 19(10), 1234-1244.
FluidFM: Development of the Instrument as well as Its Applications for 2D and 3D Lithography
Zambelli Tomaso, Aebersold Mathias J, Behr Pascal, Han Hana, Hirt Luca, Martinez Vincent, Guillaume-Gentil Orane, Vörös János (2018), FluidFM: Development of the Instrument as well as Its Applications for 2D and 3D Lithography, in Kaigala Govind V, Delamarche Emmanuel (ed.), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany, 295.
Simple and Inexpensive Paper-Based Astrocyte Co-culture to Improve Survival of Low-Density Neuronal Networks
Aebersold Mathias J., Thompson-Steckel Greta, Joutang Adriane, Schneider Moritz, Burchert Conrad, Forró Csaba, Weydert Serge, Han Hana, Vörös János (2018), Simple and Inexpensive Paper-Based Astrocyte Co-culture to Improve Survival of Low-Density Neuronal Networks, in Frontiers in Neuroscience, 12, 94.
Trends in Epidermal Stretchable Electronics for Noninvasive Long-term Healthcare Applications
Han Hana, ReichmuthAndreas M, RenzAline F, StaufferFlurin, ThielenM, VörösJános (2017), Trends in Epidermal Stretchable Electronics for Noninvasive Long-term Healthcare Applications, in International Journal of Automation and Smart Technology, 7(2), 37-52.

Collaboration

Group / person Country
Types of collaboration
Luxembourg Institute of Science and Technology (LIST) Luxembourg (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
National Technical University of Athens Greece (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure

Scientific events

Active participation

Title Type of contribution Title of article or contribution Date Place Persons involved
Micro & Nano Engineering (MNE) Talk given at a conference Integration of silver nanowires for piezoresistive sensing of SU-8 cantilevers 24.09.2018 Copenhagen, Denmark Han Hana; Zambelli Tomaso;
Micro & Nano Engineering (MNE) Poster Sideways fabrication of SU-8 hollow cantilevers and its potential as a single cell manipulation tool 24.09.2018 Copenhagen, Denmark Han Hana; Zambelli Tomaso;
Materials Research Society (MRS) Fall Meeting Poster Piezoresistive behavior of polymeric cantilevers based on the integration of nanowires 27.11.2017 Boston, United States of America Zambelli Tomaso; Han Hana;
FluidFM User Meeting Talk given at a conference Sideways fabricated, force controlled SU-8 micropipettes and applications 17.11.2017 Zurich, Switzerland Han Hana; Zambelli Tomaso;
Swiss Society for Biomedical Engineering Annual Meeting (SSBE) Poster Sideway-fabricated SU-8 hollow cantilevers 30.08.2017 Winterthur, Switzerland Han Hana; Zambelli Tomaso;
International Scanning Probe Microscopy (ISPM) Poster Piezoresistive SU-8 cantilevers based on the integration of silver nanowires 12.06.2016 Grindelwald, Switzerland Zambelli Tomaso; Han Hana;


Self-organised

Title Date Place
Materials and Processes (MaP) Graduate Symposium 09.06.2016 Zurich, Switzerland

Abstract

Atomic force microscopy (AFM) is a standard technique both for material science at the sub-micron scale and for biology at the single-cell or single molecule level. With the FluidFM, we transformed the AFM into a force-controlled syringe broadening the spectrum of applications in liquid beyond an imaging and manipulation tool to a force-controlled nanopipette for local dis-pensing and serial perturbation experiments. The FluidFM like most of the commercial AFMs is controlled via laser detection (OBD) which limits its operation to one cantilever. This project will explore the next generation of AFM and microfluidics combined together realizing a versatile system for handling in liquid environment with AFM sensitivity for spatial resolution (sub-micrometric) and force (picoNewton). Self-sensing of cantilevers in contrast to optical beam detection represents an alternative sensing method based on electrical wiring which provides on the one hand atomic resolution, on the other hand flexibility for the environment and the multiplexing of several cantilevers. SU-8 is a negative-tone photoresist which has proven to be a promis-ing polymer for microfabrication also of AFM cantilevers.The objective of this research project is threefold: i) the fabrication of microchanneled cantilevers made of SU-8 as force-controlled nanopipettes with a pyramidal tip and an aperture at its apex; ii) equipping the SU-8 cantilevers with silver nanowire based strain gauges for a high-performance self-sensing detection; iii) finally, their assembly into a multiprobe system in which each pipette can be independently driven due to its own x-y-z piezoactuator.As final demonstrator, the multipipette system will be operated as 2D printer. In collaboration with Prof. Spolenak (ETH D-MATL), we will deposit three different kinds of nanoparticles each with a different electrical properties to print a field emission transistor.The work plan is based on our preliminary studies on a microfabrication process exploiting a sacrificial layer which is later etched away forming the channel in the cantilevers as well as on the realization of microtracks of silver nanowires showing a strongly enhanced gauge factor as function of the applied strain. Accordingly, the specific tasks of this project are i) the fabrication of laser-detection SU-8 microchanneled cantilevers with a pyramidal tip, ii) the fabrication of self-sensing SU-8 microchanneled cantilevers with a pyramidal tip, and iii) the assembly of a 3-syringe system relying on the self-sensing cantilevers. The obtained cantilevers will be tested carrying out experiments on benchmark systems like yeast adhesion and nanosphere patterning which have been thoroughly characterized with the OBD FluidFM.The novel system developed within this project for high throughput serial and parallel operation of several independent nanosyringes will allow promising follow-up applications in the entire spectrum of natural sciences. For material science, new tools are required to investigate the three-dimensional structures of different substances at different scales which is so relevant because it bridges the nano with the macro world. For biology, innovative technologies at the single-cell level with regard to cell perturbation, as well as sampling, extraction, and molecular detection are in demand related to the phenotypic differentiation in a genetically identical population of cells. Finally, the multisyringe system constitutes an interdisciplinary pedagogic platform which will enable students from mechanical and electro engineering to cell biology to operate a cutting-edge tool during their bachelor and master stages.
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