SU-8 is a negative tone epoxy resin which has been first developed for pattern transfer application. The intrinsic properties and in particular the chemical and mechanical robustness led the MEMS community to use it for fabricating structural and active components of their device. SU-8 is widely used for the fabrication of high aspect ratio structures. However, the polymer is insulating and the production of conducting SU-8 is yet to be realised. In the previous project (NSF 200020-121814), we have developed carbon nanotubes based composites. Percolation threshold is about 0.2w% which indicates a good dispersion of the carbon nanotubes within the polymer matrix.
As prolongation of the project, we will complete the characterisation of the CNTs based composites and. We will also fabricate composites with graphene materials. Devices using these novel composite materials will be fabricated in collaboration with different laboratories at EPFL and in Switzerland.