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Non-contact polishing of single crystal diamond by ion beam etching

Type of publication Peer-reviewed
Publikationsform Original article (peer-reviewed)
Author Mi Sichen, Toros Adrien, Graziosi Teodoro, Quack Niels,
Project DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS
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Original article (peer-reviewed)

Journal Diamond and Related Materials
Publisher Elsevier {BV}
Volume (Issue) 92
Page(s) 248 - 252
Title of proceedings Diamond and Related Materials
DOI 10.1016/j.diamond.2019.01.007

Open Access

URL https://www.sciencedirect.com/science/article/pii/S0925963518306307
Type of Open Access Publisher (Gold Open Access)

Abstract

We propose a non-contact surface finishing method for brittle substrates by ion beam etching and we experimentally demonstrate polishing of (100) single crystal diamond surface. We model and simulate the polishing process, and verify the results experimentally by monitoring individual defects during the surface treatment. Rapid flattening of scratches and digs, as typically present on brittle substrates after mechanical polishing, is observed: trench depth is typically removed by 95% in less than 30 min. The polishing method relies on physical bombardment of the substrate surface with accelerated inert gas ions, rendering it highly versatile and applicable to a wide variety of materials.
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