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Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Type of publication Peer-reviewed
Publikationsform Proceedings (peer-reviewed)
Author Quack Niels, Sattari Hamed, Takabayashi Alain Y., Zhang Yu, Edinger Pierre, Herranz Carlos Errando-, Gylfason Kristinn B., Wang Xiaojing, Niklaus Frank, Jezzini Moises A., Hwang How Yuan, O’Brien Peter, Porcel Marco A. G., Arce Cristina Lerma, Kumar Saurav, Abasahl Banafsheh, Verheyen Peter, Bogaerts Wim,
Project DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS
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Proceedings (peer-reviewed)

Title of proceedings Optical Fiber Communication Conference
Place San Diego, California
DOI 10.1364/ofc.2019.m2d.3

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