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Silicon Photonic MEMS Phase-Shifter

Type of publication Peer-reviewed
Publikationsform Original article (peer-reviewed)
Author Sattari Hamed, Graziosi Teodoro, Kiss Marcell, Seok Tae Joon, Han Sangyoon, Wu Ming C., Quack Niels,
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Original article (peer-reviewed)

Journal Optics Express
Volume (Issue) 27(13)
Page(s) 18959
Title of proceedings Optics Express
DOI 10.1364/oe.27.018959

Open Access

Type of Open Access Publisher (Gold Open Access)


We present a design for an analog phase shifter based on Silicon Photonic MEMS technology. The operation principle is based on a two-step parallel plate electrostatic actuation mechanism to bring a vertically movable suspended tapered waveguide in a first step into proximity of the bus waveguide and to tune the phase of the propagating coupled mode in a second step by actuation of the suspended waveguide to tune the vertical gap. In the coupled state, the effective index of the optical supermode and the total accumulated phase delay can be varied by changing the vertical separation between the adiabatically tapered suspended and the fixed bus waveguides. Simulations predict that π phase shift can be achieved with an actuation voltage of 19 V, corresponding to a displacement of 19 nm. With an adiabatic coupler geometry, the optical signal can be coupled between the moving waveguide and the bus waveguide with low loss in a wide wavelength range from 1.5 μm to 1.6 μm keeping the average insertion loss below 0.3 dB.