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Optical correction of X-Ray Laser Illumination for Short- wavelength Microscopy

Type of publication Peer-reviewed
Publikationsform Proceedings (peer-reviewed)
Author Ruiz Mabel, Staub Felix, Bleiner Davide,
Project "ELAN" - EUV Laser for Actinic Nano-imaging.
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Proceedings (peer-reviewed)

Title of proceedings Conference on X-ray Lasers
Place Paris

Abstract

A critical aspect in the design of a short-wavelength microscope is the illumination profile and stability. Experimental measurements of the pointing sta- bility and divergence and optical corrections of X-ray laser source are shown. The optical corrections provided one order of magnitude improvement in the illumina- tion performance.
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