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Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools

Type of publication Peer-reviewed
Publikationsform Proceedings (peer-reviewed)
Author Bleiner Davide,
Project "ELAN" - EUV Laser for Actinic Nano-imaging.
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Proceedings (peer-reviewed)

Title of proceedings Conference on X-ray Lasers
Place Paris


Coherent short-wavelength plasma radiation demonstrated a num- ber of advantages for nano-inspection. Contending technologies are here discussed and strategies for X-ray laser optimizations are highlighted, thus bridging the gap between proor-of-principle or enabling tools.