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Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools
Type of publication
"ELAN" - EUV Laser for Actinic Nano-imaging.
Title of proceedings
Conference on X-ray Lasers
Coherent short-wavelength plasma radiation demonstrated a num- ber of advantages for nano-inspection. Contending technologies are here discussed and strategies for X-ray laser optimizations are highlighted, thus bridging the gap between proor-of-principle or enabling tools.