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Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser

Type of publication Peer-reviewed
Publikationsform Original article (peer-reviewed)
Publication date 2014
Author Bleiner Davide, Yulin Sergiy, Martynczuk Julia, Ruiz-Lopez Mabel, Arbelo Yunieski, Balmer Jürg, Günther Detlef,
Project "ELAN" - EUV Laser for Actinic Nano-imaging.
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Original article (peer-reviewed)

Journal Applied Optics
Volume (Issue) 53
Page(s) 4894 - 4902
Title of proceedings Applied Optics


A Y/Mo multilayer coating, optimized for top reflectivity at λ  12 nm, has been nano-inspected after long-term operation at the in-house soft x-ray laser. The surface and optical inspections were complemented by electron microscopy on cross sections, prepared with focused ion beam technology. A factor of 2.5 loss of reflectivity in the exposed area (ca. 30% relative loss every 100 shots), with concomitant nanoscale photodamage and particle fallout, was found. The x-ray-laser-induced damage extended as deep as 250 nm beneath the surface and as wide as the millimeter spot size.