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Bistable silicon photonic MEMS switches

Type of publication Peer-reviewed
Publikationsform Proceedings (peer-reviewed)
Author Sattari Hamed, Toros Adrien, Graziosi Teodoro, Quack Niels,
Project DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS
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Proceedings (peer-reviewed)

Title of proceedings MOEMS and Miniaturized Systems XVIII
Place San Francisco, United States
DOI 10.1117/12.2507192

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