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Elemental analysis with X-ray fluorescence spectrometry

Type of publication Peer-reviewed
Publikationsform Contribution to book (peer-reviewed)
Publication date 2012
Author Lienemann Peter, Bleiner Davide,
Project "ELAN" - EUV Laser for Actinic Nano-imaging.
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Contribution to book (peer-reviewed)

Book Short-wavelength Imaging and Spectroscopy Sources
Editor , Bleiner Davide
Publisher SPIE Digital LIbrary, Bellingham
Page(s) 0D
ISBN 9780819494566
Title of proceedings Short-wavelength Imaging and Spectroscopy Sources


Elemental analysis by means of X-ray fluorescence (XRF) spectrometry is based on the element-specific electromagnetic radiation induced as a consequence of inner-shell ionization. XRF spectrometry is ideal for the \textit{direct} analysis of solid samples, but can also investigate fluid samples. On one side, these methods allow the \textit{rapid} qualitative screening of unknown samples, without any particular sample preparation. On the other hand, it is possible to perform the \textit{fully automated} quantitative analysis of large sample sets. Further figures of merit are the '\textit{standard-less}' analysis of samples in a \textit{non-destructive} mode, and detection down to 0.01 \%. The availability of portable XRF systems\cite{ellis} is a further advantage for on-site measurements. The fundamentals are discussed to orient the user, and a survey of instrumental capabilities is provided.