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Single crystal diamond micro-disk resonators by focused ion beam milling

Type of publication Peer-reviewed
Publikationsform Original article (peer-reviewed)
Author Graziosi Teodoro, Mi Sichen, Kiss Marcell, Quack Niels,
Project DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS
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Original article (peer-reviewed)

Journal APL Photonics
Volume (Issue) 3
Page(s) 126101
Title of proceedings APL Photonics
DOI 10.1063/1.5051316

Open Access

URL https://aip.scitation.org/doi/10.1063/1.5051316
Type of Open Access Publisher (Gold Open Access)

Abstract

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm × 3 mm × 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are micro-disks of few μm in diameter and less than 1 µm thick, supported by a square or diamond section pillar resulting from the multi-directional milling. Thin aluminum and chromium layers are used to ground the substrate, limit the ion implantation, and prevent edge rounding and roughening. FIB damage is then removed by a combination of hydrofluoric acid etching, oxygen plasma cleaning, and annealing at 500 °C for 4 h in air. We experimentally characterize the optical behavior of the devices by probing the transmission of a tapered fiber evanescently coupled to the micro-disk, revealing multiple resonances with a quality factor up to 5700 in the S- and C-band.
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