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Surfaces structured by nanolithography applied for integrated immunosensor devices

Applicant Tiefenauer Louis
Number 35137
Funding scheme Swiss Priority Programmes (SPPs)
Research institution Paul Scherrer Institut
Institution of higher education Paul Scherrer Institute - PSI
Main discipline Electrical Engineering
Start/End 01.04.1993 - 28.02.1997
Approved amount 594'904.00
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Keywords (10)

NANOTECHNOLOGY; NANOLITHOGRAPHY; ATOMIC RESOLUTION; BIOSENSOR; ELECTRON TRANSFER; MINIATURIZATION; MICROMACHINING; INTEGR. FLUID TRANSPORT; BIOELECTRONIC DEVICES; GENERIC TECHNOLOGY

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