Project

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Diamond Nano-Opto-Electromechanical Systems

English title Diamond Nano-Opto-Electromechanical Systems
Applicant Quack Niels
Number 183717
Funding scheme SNSF Professorships
Research institution Institut de microtechnique EPFL - STI - IMT
Institution of higher education EPF Lausanne - EPFL
Main discipline Microelectronics. Optoelectronics
Start/End 01.06.2019 - 31.05.2021
Approved amount 768'787.00
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Keywords (5)

MEMS; Optoelectronics; Photonics; Microsystems; Diamond

Lay Summary (German)

Lead
Einkristalliner Diamant besitzt ausserordentliche Materialeigenschaften: optisch transparent, thermisch höchst leitfähig, äusserst elastisch, hart, chemisch inert, ein hoher Brechungsindex - ein wahres Wundermaterial für Anwendungen in der Mikromechanik oder in der integrierten Optik! Eine präzise Bearbeitung dieses ausserordentlichen Materials ist jedoch äusserst herausfordernd. In diesem Projekt sollen grundlegende Techniken entwickelt werden, um integrierte Optik und Photonisch Integrierte Schaltkreise aus synthetischem einkristallinem Diamant zu ermöglichen.
Lay summary

Zu diesem Zweck wird auf Prozesstechniken der Mikrosystemtechnik zurückgegriffen, wie zum Beispiel Elektronenstrahllithographie und Plasmaätzen, um präzise Diamantstrukturen im Mikrometer- und Nanometerbereich herzustellen. Diese Strukturen können als optische Elemente wie optische Gitter, Filter oder Linsen Verwendung finden. Des Weiteren wird die Herstellung von optischen Wellenleitern aus einkristallinem Diamant, sowie deren Kopplung mit optisch aktiven Farbzentren und mechanischen Schwingungen untersucht, mit möglichen Anwendungen im Bereich neuartiger Bio-Sensoren, Frequenzgebern oder Photonischen Komponenten für die Informations- und Telekommunikationstechnik. 

Direct link to Lay Summary Last update: 25.02.2019

Responsible applicant and co-applicants

Employees

Publications

Publication
Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers
Huszka Gergely, Malpiece Nicolas, Naamoun Mehdi, Mereuta Alexandru, Caliman Andreï, Suruceanu Grigore, Gallo Pascal, Quack Niels (2020), Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers, in Diamond and Related Materials, 104, 107744-107744.
Compact broadband suspended silicon photonic directional coupler
Sattari Hamed, Takabayashi Alain, Zhang Yu, Verheyen Peter, Bogaerts Wim, Quack Niels (2020), Compact broadband suspended silicon photonic directional coupler, in Optics Letters, 45(11), 2997-3000.
MEMS for Photonic Integrated Circuits
Errando-Herranz Carlos, Takabayashi Alain Yuji, Edinger Pierre, Sattari Hamed, Gylfason Kristinn B., Quack Niels (2020), MEMS for Photonic Integrated Circuits, in {IEEE} Journal of Selected Topics in Quantum Electronics, 26(2), 1-16.
MEMS-Enabled Silicon Photonic Integrated Devices and Circuits
Quack Niels, Sattari Hamed, Takabayashi Alain Yuji, Zhang Yu, Verheyen Peter, Bogaerts Wim, Edinger Pierre, Errando-Herranz Carlos, Gylfason Kristinn B. (2020), MEMS-Enabled Silicon Photonic Integrated Devices and Circuits, in {IEEE} Journal of Quantum Electronics, 56(1), 1-10.
High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching
Kiss Marcell, Graziosi Teodoro, Toros Adrien, Scharf Toralf, Santschi Christian, Martin Olivier J. F., Quack Niels (2019), High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching, in Optics Express, 27(21), 30371-30379.
Single crystal diamond blazed diffraction gratings and Fresnel microlens arrays with improved optical performance by high-resolution 3D laser lithography and pattern transfer by dry etching
Toros Adrien, Restori Nathanaël, Kiss Marcell, Scharf Toralf, Quack Niels (2019), Single crystal diamond blazed diffraction gratings and Fresnel microlens arrays with improved optical performance by high-resolution 3D laser lithography and pattern transfer by dry etching, in OSA Continuum, 2(12), 3374-3380.

Collaboration

Group / person Country
Types of collaboration
EPFL Instantlab (Prof. Henein) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
Kungliga Techniska Högskolan, KTH (Prof. Gylfason, Prof. Niklaus) Sweden (Europe)
- in-depth/constructive exchanges on approaches, methods or results
Ghent University (Prof. Baets, Prof. Bogaerts) Belgium (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
EPFL LMIS4 (Prof. Renaud) Switzerland (Europe)
- Research Infrastructure
EPFL GR-GA (Prof. Galland) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
Purdue University (Prof. Bhave) United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
Camlin Technologies SA (Dr. Felder, Dr. Fill) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Industry/business/other use-inspired collaboration
Tyndall National Institute (Prof. O'Brien) Ireland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
Ion Beam Centre, University of Surrey (Prof. Webb) Great Britain and Northern Ireland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
Gwangju Institute of Science and Technology (GIST, Prof. Seok) Korean Republic (South Korea) (Asia)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
Monash University, Imaging and Technology Development Lab (Prof. de Marco) Australia (Oceania)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
Laboratory of Ion Beam Physics, ETH Zurich (Dr. Döbeli) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
EPFL LPQM (Prof. Kippenberg) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
Commscope Connectivity Belgium Belgium (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Industry/business/other use-inspired collaboration
EPFL NAM (Prof. Martin) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
VLC Photonics S.L. Spain (Europe)
- in-depth/constructive exchanges on approaches, methods or results
University of California, Berkeley (Prof. Wu) United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Exchange of personnel
LakeDiamond SA (Dr. Gallo, CEO) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Industry/business/other use-inspired collaboration
EPFL LAPD (Prof. Moser) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure

Scientific events

Active participation

Title Type of contribution Title of article or contribution Date Place Persons involved
Sydney Nano Seminar Individual talk Silicon Photonic MEMS - Coupling Mechanics and Photonics at the Micro- and Nanoscale 20.02.2020 Sydney, Australia Quack Niels;
Optics Colloquium IMTEK Individual talk Silicon Photonic MEMS - Coupling Mechanics and Photonics at the Micro- and Nanoscale 15.01.2020 Freiburg, Germany Quack Niels;
The 4th International Symposium on Biomedical Engineering (ISBE2019) Talk given at a conference Broadly Tunable Mid-Infrared VeCSEL and Their Application 14.11.2019 Hamamatsu, Japan Quack Niels;
Asia Communications and Photonics Conference (ACP) 2019 Talk given at a conference Silicon Photonic MEMS for Efficient Reconfiguration of Photonic Integrated Circuits 02.11.2019 Chengdu, China Quack Niels;
TU Delft PME Seminar Individual talk Photonic Micro- and Nanosystems: Coupling Mechanics and Photonics at the Micro- and Nanoscale 30.09.2019 Delft, Netherlands Quack Niels;
International Conference on Diamond and Carbon Materials 2019 Poster High Reflection Gratigns in Single Crystal Diamond for Vertical External Cavity Surface Emitting Lasers 08.09.2019 Seville, Spain Quack Niels;
KU Leuven MICAS Guest Seminar Individual talk Photonic Micro- and Nanosystems: Engineering Ultra-Low Power Integrated Devices & Systems 30.08.2019 Leuven, Belgium Quack Niels;
KAIST Photonics Seminar Individual talk Micro- and Nanostructuring of Single Crystal Diamond for Photonic Applications 01.08.2019 Daejeon, Korean Republic (South Korea) Quack Niels;
2019 IEEE Photonics Society Summer Topical Meeting Series Talk given at a conference Photonic MEMS: Exploiting Mechanics at the Micro-and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits 08.07.2019 Florida, United States of America Quack Niels;
10th International Conference on Materials for Advanced Technologies Talk given at a conference Micro- and Nanostructuring of Monocrystalline Diamond for Photonic Applications 23.06.2019 Singapore, Singapore Quack Niels; Graziosi Teodoro; Mi Sichen; Kiss Marcell;
Swiss Nano Convention Poster Freestanding Silicon Photonic Devices 06.06.2019 Lausanne, Switzerland Quack Niels;
16th International Workshop on Nanomechanical Sensors NMC Poster Single Crystal Diamond Optical Microdisks for Nanomechanical Sensing 01.06.2019 Lausanne, Switzerland Mi Sichen; Graziosi Teodoro; Kiss Marcell; Quack Niels;


Knowledge transfer events

Active participation

Title Type of contribution Date Place Persons involved


Self-organised

Title Date Place

Awards

Title Year
Prix Omega scientifique (http://www.prix-omega.ch/prix-scientifique) 2020

Associated projects

Number Title Start Funding scheme
177011 Ultra High Frequency Vibrometer for MEMS/NEMS characterization 01.03.2018 R'EQUIP
157566 DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS 01.06.2015 SNSF Professorships
170759 HF Vapor Etcher for Stiction Free Release of Suspended Micro- and Nanostructures 01.12.2016 R'EQUIP

Abstract

The goal of this project is to exploit micro- and nanofabrication techniques to efficiently harness the extraordinary combination of optical, mechanical and thermal material properties of high purity synthetic single crystal diamond at the micro- and nanoscale to engineer novel and high performance diamond photonic micro- and nanosystems. We propose in particular to investigate single crystal diamond for efficient generation, routing, and processing of optical signals on an integrated diamond nano-photonic platform, with a focus on the following three pillars:(1)develop and characterize single crystal diamond nano-photonic integrated circuits(2)couple mechanical and optical resonances in micro-/nano-scale optomechanical oscillators (3)exploit optically active color centers as integrated light sources in single crystal diamond.To achieve these goals, we will tackle the following challenges: (1) the preparation of large area high quality single crystalline diamond thin films on a substrate, by development of an ion implantation based layer transfer process, (2) the engineering of passive on-chip diamond photonic components, such as waveguides, interferometers, and freestanding nano-opto-mechanical resonators, and (3) develop and demonstrate on-chip diamond photonic sources. The successful developments in this project will constitute the basis for future quantum information processing photonic integrated circuits, low phase noise optomechanical frequency references, and harsh environment and biocompatible sensors. They are expected to find applications in in Advanced and Secure Information and Communications Technologies (ICT), Mobile and Personalized Health, Sensors for Autonomous Systems, and Industry 4.0 Instrumentation, impacting societal development and contributing to economic growth.
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