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DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS

English title DIAMOND NANO-OPTO-ELECTROMECHANICAL SYSTEMS
Applicant Quack Niels
Number 157566
Funding scheme SNSF Professorships
Research institution Laboratoire de microsystèmes 4 EPFL - STI - IMM - LMIS4
Institution of higher education EPF Lausanne - EPFL
Main discipline Microelectronics. Optoelectronics
Start/End 01.06.2015 - 31.05.2019
Approved amount 1'599'963.00
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Keywords (7)

diamond; microsystems; photonics; MEMS; optoelectronics; optomechanics; nano

Lay Summary (German)

Lead
In der Entwicklung von optischen Mikro- und Nanosystemen wurden im vergangenen Jahrzehnt bedeutende Fortschritte erzielt und diese haben in Unterhaltungselektronik, Telekommunikation und Messinstrumenten unlängst verbreitet Einzug gehalten. Bisherige Systeme wie energiesparende Bildschirme für mobile Endgeräte oder Videoprojektoren basieren derzeit mehrheitlich auf Siliziumtechnologie. In diesem Forschungsprojekt sollen die Möglichkeiten zum Einsatz von künstlichem, einkristallinem Diamant in optischen Mikro- und Nanosystemen erforscht und ausgeschöpft werden.
Lay summary

In diesem Projekt sollen die ausserordentlichen mechanischen und optischen Materialeigenschaften von einkristallinem Diamant für optische Mikro- und Nanosysteme erforscht werden. Neben der Gewinnung von grundlegenden Erkenntnissen über das Verhalten von einkristallinem Diamant in optischen Mikro- und Nanosystemen soll die Entwicklung einer Plattform zur Herstellung von optischen Elementen und Systemen auf einem Mikrochip im Vordergrund stehen. Basierend auf dieser Plattform sollen im Besonderen neuartige optomechanische Oszillatoren entwickelt werden. Durch den Einsatz von einkristallinem Diamant wird hierbei eine Verminderung des Phasenrauschens angestrebt, was zu einer neuen Klasse von Oszillatoren als Alternative zu herkömmlichen Quarzoszillatoren führen dürfte.

Mit dem Forschungsprojekt werden Fortschritte in der Bearbeitung von einkristallinem Diamant für optische Mikro- und Nanosysteme erwartet, welche zu neuen Erkenntnissen führen und weitere Impulse für die Herstellung von optischen Mikro- und Nanosystemen geben dürften. Stabile optomechanische Oszillatoren mit niedrigem Phasenrauschen dürften desweitern auf kommerzielles Interesse stossen, und somit den lokalen Technologiestandort weiter stärken.

Direct link to Lay Summary Last update: 02.04.2015

Responsible applicant and co-applicants

Employees

Publications

Publication
TuE2.4 - Photonic MEMS: Exploiting Mechanics at the Micro- and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits (Invited)
Quack Niels, Sattari Hamed, Takabayashi Alain Yuji, Zhang Yu, Errando-Herranz Carlos, Edinger Pierre, Gylfason Kristinn B. (2019), TuE2.4 - Photonic MEMS: Exploiting Mechanics at the Micro- and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits (Invited), in 2019 IEEE Photonics Society Summer Topical Meeting Series (SUM), Ft. Lauderdale, FL, USAIEEE, USA.
Bistable silicon photonic MEMS switches
Sattari Hamed, Toros Adrien, Graziosi Teodoro, Quack Niels (2019), Bistable silicon photonic MEMS switches, in MOEMS and Miniaturized Systems XVIII, San Francisco, United StatesSPIE, USA.
Non-contact polishing of single crystal diamond by ion beam etching
Mi Sichen, Toros Adrien, Graziosi Teodoro, Quack Niels (2019), Non-contact polishing of single crystal diamond by ion beam etching, in Diamond and Related Materials, 92, 248-252.
Silicon Photonic MEMS Phase-Shifter
Sattari Hamed, Graziosi Teodoro, Kiss Marcell, Seok Tae Joon, Han Sangyoon, Wu Ming C., Quack Niels (2019), Silicon Photonic MEMS Phase-Shifter, in Optics Express, 27(13), 18959.
Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits
Quack Niels, Sattari Hamed, Takabayashi Alain Y., Zhang Yu, Edinger Pierre, Herranz Carlos Errando-, Gylfason Kristinn B., Wang Xiaojing, Niklaus Frank, Jezzini Moises A., Hwang How Yuan, O’Brien Peter, Porcel Marco A. G., Arce Cristina Lerma, Kumar Saurav, Abasahl Banafsheh, Verheyen Peter, Bogaerts Wim (2019), Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits, in Optical Fiber Communication Conference, San Diego, CaliforniaOSA, USA.
Single crystal diamond micro-disk resonators by focused ion beam milling
Graziosi Teodoro, Mi Sichen, Kiss Marcell, Quack Niels (2018), Single crystal diamond micro-disk resonators by focused ion beam milling, in APL Photonics, 3, 126101.
Characterization of Crystallographically Etched Single Crystal Diamond Diffraction Gratings
Kiss Marcell, Graziosi Teodoro, Toros Adrien, Scharf Toralf, Martin Olivier J.F., Quack Niels (2018), Characterization of Crystallographically Etched Single Crystal Diamond Diffraction Gratings, in 2018 International Conference on Optical MEMS and Nanophotonics (OMN), LausanneIEEE, Switzerland.
Enhancement of Optical Quality Factor by Thermal Annealing of Single Crystal Diamond Micro-Resonators
Graziosi Teodoro, Mi Sichen, Kiss Marcell, Quack Niels (2018), Enhancement of Optical Quality Factor by Thermal Annealing of Single Crystal Diamond Micro-Resonators, in 2018 International Conference on Optical MEMS and Nanophotonics (OMN), LausanneIEEE, Switzerland.
Enhancement of Optical Quality Factor by Thermal Annealing of Single Crystal Diamond Micro-Resonators
Graziosi Teodoro, Mi Sichen, Kiss Marcell, Quack Niels (2018), Enhancement of Optical Quality Factor by Thermal Annealing of Single Crystal Diamond Micro-Resonators, in 2018 International Conference on Optical MEMS and Nanophotonics (OMN), LausanneIEEE, Switzerland.
Precision micro-mechanical components in single crystal diamond by deep reactive ion etching
Toros Adrien, Kiss Marcell, Graziosi Teodoro, Sattari Hamed, Gallo Pascal, Quack Niels (2018), Precision micro-mechanical components in single crystal diamond by deep reactive ion etching, in Microsystems & Nanoengineering, 4(1), 12-12.

Collaboration

Group / person Country
Types of collaboration
Ghent University (Prof. Baets, Prof. Bogaerts) Belgium (Europe)
- in-depth/constructive exchanges on approaches, methods or results
Camlin Technologies SA (Dr. Felder, Dr. Fill) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Industry/business/other use-inspired collaboration
Tyndall National Institute (Prof. O'Brien) Ireland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
Gwangju Institute of Science and Technology (GIST, Prof. Seok) Korean Republic (South Korea) (Asia)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Exchange of personnel
Ion Beam Centre, University of Surrey (Prof. Webb) Great Britain and Northern Ireland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
EPFL LPQM (Prof. Kippenberg) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
EPFL LMIS4 (Prof. Renaud) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
Laboratory of Ion Beam Physics, ETH Zurich (Dr. Döbeli) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
Kungliga Techniska Högskolan, KTH (Prof. Gylfason, Prof. Niklaus) Sweden (Europe)
- in-depth/constructive exchanges on approaches, methods or results
LakeDiamond SA (Dr. Gallo, CEO) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Industry/business/other use-inspired collaboration
EPFL LAPD (Prof. Moser) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
EPFL GR-GA (Prof. Galland) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
EPFL NAM (Prof. Martin) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
University of California, Berkeley (Prof. Wu) United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Exchange of personnel
EPFL Instantlab (Prof. Henein) Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results

Scientific events

Active participation

Title Type of contribution Title of article or contribution Date Place Persons involved
European Conference On Integrated Optics Talk given at a conference MEMS-based Silicon Photonic Integrated Devices and Circuits 24.04.2019 Ghent, Belgium Quack Niels;
2019 Optical Fiber Communications Conference and Exhibition (OFC) Talk given at a conference Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits 02.03.2019 San Diego, California, United States of America Quack Niels;
SPIE Photonics West OPTO, MOEMS and Miniaturized Systems XVIII Talk given at a conference Bistable Silicon Photonic MEMS Switches 02.02.2019 San Francisco, United States of America Graziosi Teodoro; Quack Niels;
Stanford SystemX Alliance Seminar Individual talk Photonic MEMS: Coupling Mechanics & Photonics at the Micro and Nanoscale 31.01.2019 Stanford University, California, United States of America Quack Niels;
SMYLE Workshop on Oscillators Talk given at a conference Micro- and Nanostructuring of Single Crystal Diamond for Photonic Applications 10.12.2018 Neuchâtel, Switzerland Mi Sichen; Kiss Marcell; Quack Niels; Graziosi Teodoro;
11th International Conference on Optics-Photonics Design & Fabrication (ODF) Talk given at a conference Micro- and Nanostructuring of Single Crystal Diamond for Photonic Applications 28.11.2018 Hiroshima, Japan Quack Niels; Graziosi Teodoro; Kiss Marcell; Mi Sichen;
29th International Conference on Diamond and Carbon Materials Poster Fabrication and transfer of thin single crystal diamond membranes 02.09.2018 Dubrovnik, Croatia Kiss Marcell; Graziosi Teodoro; Quack Niels;
29th International Conference on Diamond and Carbon Materials Poster Self-organized nanoscale patterns by ion bombardment on (100) single crystal diamond 02.09.2018 Dubrovnik, Croatia Quack Niels; Mi Sichen; Graziosi Teodoro;
29th International Conference on Diamond and Carbon Materials Poster Non-contact polishing of single crystal diamond by ion beam etching 02.09.2018 Dubrovnik, Croatia Mi Sichen; Quack Niels; Graziosi Teodoro;
IEEE 2018 International Conference on Optical MEMS and Nanophotonics Talk given at a conference Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators 29.07.2018 Lausanne, Switzerland Mi Sichen; Kiss Marcell; Quack Niels;
IEEE 2018 International Conference on Optical MEMS and Nanophotonics Talk given at a conference Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators 29.07.2018 Lausanne, Switzerland Graziosi Teodoro; Kiss Marcell; Mi Sichen; Quack Niels;
IEEE 2018 International Conference on Optical MEMS and Nanophotonics Talk given at a conference Characterization of crystallographically etched single crystal diamond diffraction gratings 29.07.2018 Lausanne, Switzerland Graziosi Teodoro; Kiss Marcell; Quack Niels;
OSA Advanced Photonics Congress Talk given at a conference Surface Micromachined Silicon Photonic MEMS: A Scalable Technology Platform for Photonic Network Components 02.07.2018 Zurich, Switzerland Quack Niels;
3rd European Summerschool on PICs for Optical Interconnects Talk given at a conference Silicon Photonic MEMS for Large Scale Optical Switches 27.06.2018 Thessaloniki, Greece Quack Niels;
ePIXfab Silicon Photonics Summer School (3rd Edition) Talk given at a conference MEMS Based Optical Switching 13.06.2018 Ghent, Belgium Quack Niels;
19th CMi Annual Review Meeting Talk given at a conference Single Crystal Diamond as a Material for Micro- and Nanosystems 08.05.2018 Lausanne, Switzerland Graziosi Teodoro; Kiss Marcell; Quack Niels; Mi Sichen;
IEEE NEMS 2018 Talk given at a conference Diamond Photonic Micro- and Nanosystems 25.04.2018 Singapore, Singapore Graziosi Teodoro; Quack Niels; Kiss Marcell;
SPIE Photonics West OPTO, Advances in Photonics of Quantum Computing, Memory, and Communication XI Talk given at a conference Freestanding Optical Micro-Disk Resonators in Single Crystal Diamond by Reactive Ion Etching and Multidirectional Focused Ion Beam Milling 24.01.2018 San Francisco, CA, United States of America Kiss Marcell; Quack Niels; Graziosi Teodoro;
SPIE Photonics West LASE, Components and Packaging for Laser Systems Poster Trapezoidal diffraction grating beam splitters in single crystal diamond 24.01.2018 San Francisco, CA, United States of America Kiss Marcell; Graziosi Teodoro; Quack Niels;
SPIE Photonics West OPTO, MOEMS and Miniaturized Systems XVII Talk given at a conference Silicon photonic MEMS variable optical attenuator 24.01.2018 San Francisco, CA, United States of America Quack Niels; Graziosi Teodoro;
Berkeley Sensor & Actuator Center BSAC Technology Seminar Individual talk Single Crystal Diamond as a Material for Micro- and Nanosystems 23.01.2018 Berkeley, California, United States of America Quack Niels;
28th International Conference on Diamond and Carbon Materials Poster Fabrication of thick and high-aspect ratio components in single crystalline diamond by deep reactive ion etching 03.09.2017 Gothenburg, Sweden Quack Niels; Kiss Marcell; Graziosi Teodoro;
28th International Conference on Diamond and Carbon Materials Talk given at a conference Demonstration of V-groove diffraction gratings in single crystal diamond 03.09.2017 Gothenburg, Sweden Quack Niels; Graziosi Teodoro; Kiss Marcell;
Photonics Seminar Individual talk Optical Switching and Silicon Photonic MEMS 28.08.2017 Daejeon (KAIST), Korean Republic (South Korea) Quack Niels;
24th International Congress of Optics Talk given at a conference Optical Switching with Silicon Photonic MEMS 24.08.2017 Tokyo, Japan Quack Niels;
IEEE 2017 International Conference on Optical MEMS and Nanophotonics Talk given at a conference Analog Silicon Photonic MEMS Phase-Shifter with Double-Step Electrostatic Actuation 14.08.2017 Santa Fe, New Mexico, United States of America Quack Niels;
Fastree 3D Research Day Individual talk 3D imaging: Sub-mm Resolution Ranging with a Chip-Scale FMCW LIDAR source 17.03.2017 Lausanne, Switzerland Quack Niels;
NB Photonics Seminar Individual talk Optical Switching with Silicon Photonic MEMS 01.12.2016 Ghent University, Belgium Quack Niels;
Photonics Seminar Individual talk Optical Switching with Silicon Photonic MEMS 01.12.2016 TU Eindhoven, Netherlands Quack Niels;
Photonics Seminar Individual talk Optical Switching with Silicon Photonic MEMS 30.11.2016 ESTEC Noordwijk, Netherlands Quack Niels;
IEEE 2016 International Conference on Optical MEMS and Nanophotonics Talk given at a conference Die Level Release of Silicon Photonic MEMS 01.08.2016 Hebrew University of Jerusalem, Israel Quack Niels;
17th CMi Annual Review Meeting Talk given at a conference Scalable On-Chip Optical Switches Based on Silicon Photonic MEMS 03.05.2016 Lausanne, Switzerland Quack Niels;
EDMI Research Day 2015 Talk given at a conference Engineering Photonic Micro- and Nanosystems 10.12.2015 Lausanne, Switzerland Quack Niels;
EPFL Photonics Day 2015 Talk given at a conference Optical Switching in Photonic Micro- and Nanosystems 06.11.2015 Lausanne, Switzerland Quack Niels;
Frontiers in Nanophotonics Poster Engineering Nano-Opto-Electromechanical Systems 30.08.2015 Ascona, Switzerland Quack Niels;


Self-organised

Title Date Place
Symposium Latsis 2019 on Diamond Photonics 19.05.2019 Lausanne, Switzerland

Knowledge transfer events

Active participation

Title Type of contribution Date Place Persons involved
Student Outreach: EPFL Information Days for Highschool students Performances, exhibitions (e.g. for education institutions) 22.11.2018 Lausanne, Switzerland Quack Niels; Graziosi Teodoro; Kiss Marcell;
Student Outreach: A Microfabrication Experience at the EPFL Clean Room CMi for the students of Gymnasium Könitz Performances, exhibitions (e.g. for education institutions) 03.07.2018 Lausanne, Switzerland Graziosi Teodoro; Kiss Marcell; Quack Niels;
OSA Student Event - Panel Discussion Performances, exhibitions (e.g. for education institutions) 01.07.2018 Zurich, Switzerland Quack Niels;
Gymnasium Laufen - Student Outreach: Einblick in die Welt der Mikrotechnik Talk 05.09.2016 Laufen, Switzerland Quack Niels;


Self-organised

Title Date Place
Gymnasium - Student Outreach: Microfabrication at the CMi Clean Room 03.07.2018 EPFL, Switzerland
Gymnasium - Student Outreach: Microstructuration du Diamant 15.09.2017 EPFL, Switzerland

Communication with the public

Communication Title Media Place Year
New media (web, blogs, podcasts, news feeds etc.) Blockchain : the first crowd-funded diamond "mine" is on line EPFL News Feed International Western Switzerland 2018
Media relations: print media, online media Des mécanismes en diamant 24 Heures Lausanne Western Switzerland 2018
Media relations: print media, online media Des mécanismes horlogers en diamant PressePortal International 2018
Media relations: print media, online media Diamond watch components SNSF Press Release International 2018
Media relations: print media, online media Ein Hemmungsrad aus künstlichem Diamant für die mechanische Uhr Stone Ideas International 2018
Media relations: print media, online media EPFL : vers des mécanismes horlogers en diamant Le Salon Online de la Joaillerie et de l'Horlogerie Western Switzerland 2018
Media relations: radio, television EPFL: vers des mécanismes horlogers en diamant RJB International Western Switzerland 2018
Media relations: print media, online media EPFL: vers des mécanismes horlogers en diamant AGEFI Western Switzerland 2018
Media relations: print media, online media Forscher formen Diamant für Uhren UnternehmerZeitung German-speaking Switzerland 2018
Media relations: print media, online media Innovation de I’EPFL La Liberté Western Switzerland 2018
Media relations: print media, online media Le diamant de labo, plus vrai que nature? Bilan Western Switzerland 2018
Media relations: print media, online media Neues Verfahren: Millimeterkleine mechanische Systeme durch reaktives Ionenätzen chemie.de International 2018
New media (web, blogs, podcasts, news feeds etc.) Precision micro-mechanical components in single crystal diamond by deep reactive ion etching X-Mol International 2018
Media relations: print media, online media Swiss team carves miniscule watch component from synthetic diamond The Engineer International 2018
Media relations: print media, online media Tech-Transfer: Using diamonds to recharge civilian drones in flight International Western Switzerland 2018
New media (web, blogs, podcasts, news feeds etc.) Uhrenbestandteile aus Diamant Innovations Report International 2018
Media relations: print media, online media Un diamant pour recharger les drones civils en vol Western Switzerland 2018
Media relations: print media, online media Un laser pour recharger les drones en plein vol International Western Switzerland 2018
New media (web, blogs, podcasts, news feeds etc.) Watch components made out of diamonds STI EPFL News Feed International 2018
New media (web, blogs, podcasts, news feeds etc.) Carving diamonds for optical components EPFL News Feed Western Switzerland International 2017
New media (web, blogs, podcasts, news feeds etc.) Diamond optical gratings to enable new uses in spectroscopy and high-power laser control Laser Focus World International 2017
New media (web, blogs, podcasts, news feeds etc.) Twitter Feed Twitter International 2017

Awards

Title Year
Young Scholar Award, DCM2017, 28th International Conference on Diamond and Carbon Materials, Gothenburg, Sweden, 3-7 September 2017 2017

Patents

Title Date Number Inventor Owner
NON-CONTACT POLISHING OF SINGLE CRYSTAL DIAMOND BY ION BEAM ETCHING 27.07.2018 PCT/IB2018/055622

Associated projects

Number Title Start Funding scheme
170759 HF Vapor Etcher for Stiction Free Release of Suspended Micro- and Nanostructures 01.12.2016 R'EQUIP
177011 Ultra High Frequency Vibrometer for MEMS/NEMS characterization 01.03.2018 R'EQUIP
183717 Diamond Nano-Opto-Electromechanical Systems 01.06.2019 SNSF Professorships

Abstract

In this research project, we propose to investigate the extraordinary combination of optical and mechanical properties of single crystalline diamond for integrated nano-photonic circuits and Micro-Electro-Mechanical Systems (MEMS) for a new class of high performance optical MEMS. Based on diamond-on-insulator technology, low phase noise optomechanical oscillators and integrated optical MEMS will be demonstrated, making use of the unique combination of optical and mechanical properties of single crystalline diamond. A successful demonstration will be a breakthrough in nano-photonic single-chip integration, combining source, detector and micro-/nano-opto-electromechanical systems on a single chip. The material system not only enables completely new devices, but the material properties predict also unprecedented performance, including low optical and low mechanical losses, resulting in low threshold power, and low phase noise simultaneously, which has the potential to demonstrate that optomechanical oscillators can exceed the performance of traditional quartz oscillators for the first time. These proposed developments are expected to have a wide scope of potential applications, such as stable frequency references, optical frequency combs, optical MEMS for telecommunication and highly sensitive biomedical sensor applications, atomic clocks, energy efficient systems and energy harvesters.
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