Sensors; Dissipation; Piezoelectric; MEMS; NEMS; Frequency stability
Lozzi Andrea, De Pastina Annalisa, Yen Ernest Ting-Ta, Villanueva Luis Guillermo (2019), Engineered acoustic mismatch for anchor loss control in contour mode resonators, in Applied Physics Letters
, 114(10), 103502-103502.
De Pastina Annalisa, Matloub Ramin, Muralt Paul, Villanueva Luis G., Howell Kaitlin M., Bashir Waqas (2019), Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN, in Journal of Vacuum Science & Technology A
, 37(2), 021504-021504.
Lozzi Andrea, Ting-Ta Yen Ernest, Muralt Paul, Villanueva Luis Guillermo (2019), Al 0.83 Sc 0.17 N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%, in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
, 66(1), 146-153.
De Pastina A., Maillard D., Villanueva L.G. (2018), Fabrication of suspended microchannel resonators with integrated piezoelectric transduction, in Microelectronic Engineering
, 192, 83-87.
Yandrapalli Soumya, Ruffieux David, Villanueva Luis G. (2017), Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS, in IEEE Transactions on Nanotechnology
, 16(4), 653-658.
Larsen T, Schmid S, Dohn S, Sader J E, Boisen A, Villanueva L G (2017), Position and mode dependent optical detection back-action in cantilever beam resonators, in Journal of Micromechanics and Microengineering
, 27(3), 035006-035006.
Sansa Marc, Sage Eric, Bullard Elizabeth C, Gély Marc, Alava Thomas, Colinet Eric, Naik Akshay K, Villanueva Luis Guillermo, Duraffourg Laurent, Roukes Michael L, Jourdan Guillaume, Hentz Sébastien (2016), Frequency fluctuations in silicon nanoresonators., in Nature nanotechnology
, 11(6), 552-8.
Schmid S, Villanueva LG, Roukes ML (2016), Fundamentals of Nanomechanical Resonators
, Springer, -.
Villanueva Luis Guillermo, Bausells Joan, Brugger Juergen (2016), Grand Challenge in N/MEMS, in Frontiers in Mechanical Engineering
, 1, 1.
Liviu Nicu Vaida Auzelyte Luis Guillermo Villanueva Nuria Barniol Francesc Perez‐Murano Warner (2016), Nanoelectromechanical Systems (NEMS), in Oliver Brand Isabelle Dufour Stephen Heinrich Fabien Josse (ed.), Wiley, -, 203.
A. Abazari S. Safavi G. Rezazadeh and L.G. Villanueva (2015), Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures, in Sensors
Vazquez-Mena O., Gross L., Xie S., Villanueva L. G., Brugger J. (2015), Resistless nanofabrication by stencil lithography: A review, in MICROELECTRONIC ENGINEERING
, 132, 236-254.
Villanueva L. G., Schmid S. (2014), Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators, in PHYSICAL REVIEW LETTERS
, 113(22), 227201.
Resonant nano-electro-mechanical systems (NEMS) have been showing outstanding performance as mass, force, charge and magnetic sensors. However, their predicted ultimate limits of detection are far from being achieved. It is the main purpose of this project to study and analyze the different sources of dissipation and frequency instability that determine the final performance of NEMS devices. This will be tackled using piezoelectric (PZE) transduction due to its high linearity and non-dissipative nature. Three environments will be analyzed: vacuum, air and liquid; and the intent is to optimize the performance in each environment separately and demonstrate the feasibility for commercial applications of some of the fabricated devices.