Project

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P-NEMS: PiezoElectric-Nano-electro-mechanical sensors

English title P-NEMS: PiezoElectric-Nano-electro-mechanical sensors
Applicant Villanueva Torrijo Luis Guillermo
Number 144695
Funding scheme SNSF Professorships
Research institution Institut de microtechnique EPFL - STI - IMT
Institution of higher education EPF Lausanne - EPFL
Main discipline Microelectronics. Optoelectronics
Start/End 01.07.2013 - 30.06.2017
Approved amount 1'598'967.00
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All Disciplines (4)

Discipline
Microelectronics. Optoelectronics
Other disciplines of Engineering Sciences
Information Technology
Electrical Engineering

Keywords (6)

Sensors; Dissipation; Piezoelectric; MEMS; NEMS; Frequency stability

Lay Summary (French)

Lead
Depuis longtemps les systèmes mécaniques ont une très grande importance dans notre société. Ce sont donc des systèmes qui se sont développés en même temps que notre société et qui ont amélioré leurs performances tout en réduisant leurs dimensions. De ce fait, nous trouvons aujourd’hui des systèmes micro-électro-mécaniques (MEMS) dans nos voitures, téléphones portables, GPS, etc.
Lay summary

Les dimensions habituelles de ces MEMS sont d’environ 1 mm, mais avec le développement de la technologie pour la fabrication microélectronique, nous avons la possibilité de réduire de 1000 fois leurs dimensions à fin de créer des systèmes nano-électro-mécaniques (NEMS). Les NEMS sont très intéressants du point de vue des capteurs qu’ils intègrent car leurs dimensions très réduites leur donnent une sensibilité accrue. Néanmoins, la commercialisation des NEMS est compliquée puisque les prédictions théoriques en cours sur la résolution et la sensibilité de ces capteurs n'ont jamais été obtenues expérimentalement.

L'objectif principal de ce projet est d'élucider les raisons qui entravent les performances des NEMS puis de proposer les moyens de résoudre ces difficultés. En outre, le projet vise à étendre l’utilisation de ces capteurs conventionnels au-delà des capteurs de masse. Des capteurs de rigidité pour le diagnostic du cancer seront également développés.

Certaines applications à long terme des dispositifs développés dans ce projet seront aussi envisagées, de ce fait, la recherche fondamentale sur la performance des appareils aura un but clair et tangible. La recherche scientifique du projet est divisée en trois sous-projets en fonction des trois éléments qui interagissent avec le résonateur: (i) l’air, pour la détection gravimétrique; (ii) le liquide, pour les appareils qui détectent la rigidité; et (iii) le vide pour étudier le comportement collectif et la dynamique non linéaire des systèmes.

Direct link to Lay Summary Last update: 31.05.2013

Responsible applicant and co-applicants

Employees

Publications

Publication
Engineered acoustic mismatch for anchor loss control in contour mode resonators
Lozzi Andrea, De Pastina Annalisa, Yen Ernest Ting-Ta, Villanueva Luis Guillermo (2019), Engineered acoustic mismatch for anchor loss control in contour mode resonators, in Applied Physics Letters, 114(10), 103502-103502.
Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
De Pastina Annalisa, Matloub Ramin, Muralt Paul, Villanueva Luis G., Howell Kaitlin M., Bashir Waqas (2019), Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN, in Journal of Vacuum Science & Technology A, 37(2), 021504-021504.
Al 0.83 Sc 0.17 N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%
Lozzi Andrea, Ting-Ta Yen Ernest, Muralt Paul, Villanueva Luis Guillermo (2019), Al 0.83 Sc 0.17 N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%, in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 66(1), 146-153.
Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
De Pastina A., Maillard D., Villanueva L.G. (2018), Fabrication of suspended microchannel resonators with integrated piezoelectric transduction, in Microelectronic Engineering, 192, 83-87.
Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS
Yandrapalli Soumya, Ruffieux David, Villanueva Luis G. (2017), Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS, in IEEE Transactions on Nanotechnology, 16(4), 653-658.
Position and mode dependent optical detection back-action in cantilever beam resonators
Larsen T, Schmid S, Dohn S, Sader J E, Boisen A, Villanueva L G (2017), Position and mode dependent optical detection back-action in cantilever beam resonators, in Journal of Micromechanics and Microengineering, 27(3), 035006-035006.
Frequency fluctuations in silicon nanoresonators.
Sansa Marc, Sage Eric, Bullard Elizabeth C, Gély Marc, Alava Thomas, Colinet Eric, Naik Akshay K, Villanueva Luis Guillermo, Duraffourg Laurent, Roukes Michael L, Jourdan Guillaume, Hentz Sébastien (2016), Frequency fluctuations in silicon nanoresonators., in Nature nanotechnology, 11(6), 552-8.
Fundamentals of Nanomechanical Resonators
Schmid S, Villanueva LG, Roukes ML (2016), Fundamentals of Nanomechanical Resonators, Springer, -.
Grand Challenge in N/MEMS
Villanueva Luis Guillermo, Bausells Joan, Brugger Juergen (2016), Grand Challenge in N/MEMS, in Frontiers in Mechanical Engineering, 1, 1.
Nanoelectromechanical Systems (NEMS)
Liviu Nicu Vaida Auzelyte Luis Guillermo Villanueva Nuria Barniol Francesc Perez‐Murano Warner (2016), Nanoelectromechanical Systems (NEMS), in Oliver Brand Isabelle Dufour Stephen Heinrich Fabien Josse (ed.), Wiley, -, 203.
Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures
A. Abazari S. Safavi G. Rezazadeh and L.G. Villanueva (2015), Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures, in Sensors, 28543.
Resistless nanofabrication by stencil lithography: A review
Vazquez-Mena O., Gross L., Xie S., Villanueva L. G., Brugger J. (2015), Resistless nanofabrication by stencil lithography: A review, in MICROELECTRONIC ENGINEERING, 132, 236-254.
Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators
Villanueva L. G., Schmid S. (2014), Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators, in PHYSICAL REVIEW LETTERS, 113(22), 227201.

Collaboration

Group / person Country
Types of collaboration
CSEM-Neuchâtel Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
MicroSens Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
- Industry/business/other use-inspired collaboration
Caltech United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
Meinhart, UCSB United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
Pennathur, UCSB United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
Vazquez-Mena, UCSD United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
Nanolab-EPFL Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
University of Melbourne Australia (Oceania)
- in-depth/constructive exchanges on approaches, methods or results
LMSC-EPFL Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
LC-EPFL Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
LMIS4-EPFL Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
IMM-CSIC Spain (Europe)
- in-depth/constructive exchanges on approaches, methods or results
Feng, CaseWestern University United States of America (North America)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Exchange of personnel
LMIS1-EPFL Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
CEA-LETI, Grenoble France (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
DTU Nanoprobes Denmark (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
APIX Analytics France (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
- Exchange of personnel
- Industry/business/other use-inspired collaboration
PowerLAB, EPFL Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure

Scientific events

Active participation

Title Type of contribution Title of article or contribution Date Place Persons involved
Transducers 2017 Talk given at a conference Piezoelectric NEMS 26.06.2017 Kaohsioung, Taiwan Villanueva Torrijo Luis Guillermo; De Pastina Annalisa; Lozzi Andrea; Howell Kaitlin Marie;
14th Internatonal Workshop on Nanomechanical Cantilever Sensors (NMC) Talk given at a conference Optimization of Frequency Noise in NEMS 04.04.2017 Hawaii, United States of America Villanueva Torrijo Luis Guillermo;
42nd International Conference on Micro and Nano Engineering Poster Parylene-Based Hollow Nanomechanical Resonators For Bioapplications 21.09.2016 Vienna, Austria De Pastina Annalisa; Villanueva Torrijo Luis Guillermo;
42nd International Conference on Micro and Nano Engineering Poster 50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators 21.09.2016 Vienna, Austria Howell Kaitlin Marie; Villanueva Torrijo Luis Guillermo; De Pastina Annalisa; Bashir Waqas;
42nd International Conference on Micro and Nano Engineering Poster Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer 21.09.2016 Vienna, Austria Villanueva Torrijo Luis Guillermo;
5th Micro and Nano Flows Conference (MNF) Talk given at a conference 3D FEM dissipation model of suspended micro channel resonators 05.09.2016 Milano, Italy De Pastina Annalisa; Villanueva Torrijo Luis Guillermo;
Mechanical Engineering Seminar Series Individual talk NEMS: From Devices to Systems 26.05.2016 Lausanne, Switzerland Villanueva Torrijo Luis Guillermo;
IEEE IFCS Poster Modelling anchor losses in piezoelectric contour mode resonators 09.05.2016 Saint Louis, United States of America Lozzi Andrea;
Focus on Mechanical Engineering Individual talk NEMS: From Devices to Systems 26.04.2016 Delft, Netherlands Villanueva Torrijo Luis Guillermo;
Electrical Engineering Seminar Series Individual talk NEMS: From Devices To Systems 08.04.2016 Milwaukee, United States of America Villanueva Torrijo Luis Guillermo;
Workshop in Mechanical Engineering Individual talk NEMS: From Devices to Systems 29.02.2016 Santa Barbara, United States of America Villanueva Torrijo Luis Guillermo;
NanoBioTech Montreux Poster Suspended Microchannels for Cell Stiffness detection 09.11.2015 Montreux, Switzerland De Pastina Annalisa;
IEEE NANO 2015 Talk given at a conference NEMS Oscillators: Challenges and workarounds 03.08.2015 Rome, Italy Villanueva Torrijo Luis Guillermo;
5th Swiss Nano Convention Poster Nano-Acoustic Bragg reflectors for CMOS-embedded NEMS 27.05.2015 Neuchâtel, Switzerland Villanueva Torrijo Luis Guillermo;
Workshop on NEMS resonators Individual talk NEMS sensors - Future trends and challenges 30.04.2015 Pittsburgh, United States of America Villanueva Torrijo Luis Guillermo;
SMYLE workshop on Future Trends of Miniaturized Resonators Individual talk NEMS Oscillators - Challenges and workarounds - Does it really make sense? 24.03.2015 Neuchâtel, Switzerland Villanueva Torrijo Luis Guillermo;
40th International Conference on Micro and Nano Engineering Talk given at a conference Tranduction back-action in NEMS and MEMS 26.09.2014 Lausanne, Switzerland Villanueva Torrijo Luis Guillermo;
11th International Workshop on Nanomechanical Cantilever Sensors (NMC) Talk given at a conference Laser Detection Back-Action in Cantilevers 30.04.2014 Madrid, Spain Villanueva Torrijo Luis Guillermo;
11th International Workshop on Nanomechanical Cantilever Sensors (NMC) Poster Metal-Insulator Interface Losses in Multimaterial Resonators 30.04.2014 Madrid, Spain Villanueva Torrijo Luis Guillermo;
27nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Poster Interface Losses in Multimaterial Resonators 27.01.2014 San Francisco, United States of America Villanueva Torrijo Luis Guillermo;


Self-organised

Title Date Place
5th Swiss Nano Convention 27.05.2015 Neuchâtel, Switzerland
EPFL-LANEF Workshop on Nanomechanics 10.07.2013 EPFL, Lausanne, Switzerland

Knowledge transfer events

Active participation

Title Type of contribution Title of article or contribution Date Place Persons involved
Advanced NEMS lab Performances, exhibitions (e.g. for education institutions) 25.03.2017 Lausanne, Switzerland
2D NEMS - A new paradigm Performances, exhibitions (e.g. for education institutions) 14.09.2016 Lausanne, Switzerland
2D NEMS - A new paradigm Performances, exhibitions (e.g. for education institutions) 29.04.2016 Lausanne, Switzerland
Piezoelectric NEMS - Fundamentals and Applications Performances, exhibitions (e.g. for education institutions) 14.09.2015 Lausanne, Switzerland


Awards

Title Year
Microelectronic Engineering Young Investigator Award 2014

Associated projects

Number Title Start Funding scheme
150776 Nano-Frazor 01.01.2014 R'EQUIP
170759 HF Vapor Etcher for Stiction Free Release of Suspended Micro- and Nanostructures 01.12.2016 R'EQUIP
177011 Ultra High Frequency Vibrometer for MEMS/NEMS characterization 01.03.2018 R'EQUIP
157771 Cryofree magnet with variable temperature insert 01.02.2015 R'EQUIP
170590 2D Piezoelectric NEMS 01.07.2017 SNSF Professorships

Abstract

Resonant nano-electro-mechanical systems (NEMS) have been showing outstanding performance as mass, force, charge and magnetic sensors. However, their predicted ultimate limits of detection are far from being achieved. It is the main purpose of this project to study and analyze the different sources of dissipation and frequency instability that determine the final performance of NEMS devices. This will be tackled using piezoelectric (PZE) transduction due to its high linearity and non-dissipative nature. Three environments will be analyzed: vacuum, air and liquid; and the intent is to optimize the performance in each environment separately and demonstrate the feasibility for commercial applications of some of the fabricated devices.
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