Projekt

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Nanoscale thermal and electrical characterization

Titel Englisch Nanoscale thermal and electrical characterization
Gesuchsteller/in Gotsmann Bernd
Nummer 134777
Förderungsinstrument Projektförderung (Abt. I-III)
Forschungseinrichtung IBM Research GmbH
Hochschule Firmen/Privatwirtschaft - FP
Hauptdisziplin Physik der kondensierten Materie
Beginn/Ende 01.05.2011 - 31.01.2015
Bewilligter Betrag 383'754.00
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Alle Disziplinen (4)

Disziplin
Physik der kondensierten Materie
Mikroelektronik, Optoelektronik
Materialwissenschaften
Maschineningenieurwesen

Keywords (5)

Nanotechnology; Scanning probe microscopy; Heat transport; Charge transport; Hot spot

Lay Summary (Englisch)

Lead
Lay summary

With increasing integration densities and performance improvements in microelectronics nanoscale characterization methods become important. While structural characterization is based on numerous well-established methods, thermal and electrical characterization is lacking.

Local heat production limits the performance and speed that a chip can be operated at. It leads to the formation of so-called hot-spots. To date there is no method readily available to test devices with sufficient precision (~10 ºC) and resolution (~10 nm) to characterize and understand such hot-spots. The electrical characterization on the nanoscale is of similar relevance. In field effect transistors (FETs), for example, one of the most pressing issues today is to be able to produce highly defined doping regions.

Both thermal and electrical characterization is linked to open questions of fundamental science such as thermal conduction in nanoscale structures. Furthermore, in nanoscale electronic devices currently being explored, the simultaneous determination of both thermal and electronic properties during operation becomes decisive. None of the two can be understood properly without regarding the other.

The research project aims at solving such issues using new developments in scanned probe microscopy with a suitable electrical and thermal characterization at lateral resolutions in the nanometer range. For this, a scanning thermal microscopy (SThM) setup will be developed for measuring temperature distributions at high lateral resolution. Furthermore, Kelvin probe force microscopy (KFM) will measure distributions of charge, surface potential and doping levels on operational devices. Finally, the two techniques shall be combined to give the full characterization of the same devices.

Direktlink auf Lay Summary Letzte Aktualisierung: 21.02.2013

Verantw. Gesuchsteller/in und weitere Gesuchstellende

Mitarbeitende

Publikationen

Publikation
Local thermometry of self-heated nanoscale devices
Menges Fabian, Motzfeld Fabian, Schmid Heinz, Mensch Philipp, Dittberner Matthias, Karg Siegfried, Riel Heike, Gotsmann Bernd (2016), Local thermometry of self-heated nanoscale devices, in IEEE International Electron Devices Meeting (IEDM), San FranciscoIEEE, New York.
Nanoscale thermometry by scanning thermal microscopy
Menges Fabian, Riel Heike, Stemmer Andreas, Gotsmann Bernd (2016), Nanoscale thermometry by scanning thermal microscopy, in Review of Scientific Instruments, 87, 074902.
Temperature mapping of operating nanoscale devices by scanning probe thermometry
Menges Fabian, Mensch Philipp, Schmid Heinz, Riel Heike, Stemmer Andreas, Gotsmann Bernd (2016), Temperature mapping of operating nanoscale devices by scanning probe thermometry, in Nature Communications, 7, 1087.
Kelvin probe force microscopy for local characterisation of active nanoelectronic devices
Wagner Tino, Beyer Hannes, Reissner Patrick, Mensch Philipp, Riel Heike, Gotsmann Bernd, Stemmer Andreas (2015), Kelvin probe force microscopy for local characterisation of active nanoelectronic devices, in Beilstein Journal of Nanotechnology, 6, 2193-2206.
Length-Dependent Thermal Transport along Molecular Chains
Meier Tobias, Menges Fabian, Nirmalraj Peter, Hoelscher Hendrik, Riel Heike, Gotsmann Bernd (2014), Length-Dependent Thermal Transport along Molecular Chains, in Physical Review Letters, 113(6), 060801.
Heat dissipation and thermometry in nanosystems: When interfaces dominate
Gotsmann Bernd, Menges Fabian, Karg Siegfried F., Troncale Valentina, Lantz Mark A., Mensch Philipp F J, Schmid Heinz, Das Kanungo Pratyush, Drechsler Ute, Schmidt Volker, Tschudy Meinrad, Stemmer Andreas, Riel Heike (2013), Heat dissipation and thermometry in nanosystems: When interfaces dominate, in Device Research Conference - Conference Digest, DRC, 231-232.
Thermal Transport into Graphene through Nanoscopic Contacts
Menges Fabian, Riel Heike, Stemmer Andreas, Dimitrakopoulos Christos, Gotsmann Bernd (2013), Thermal Transport into Graphene through Nanoscopic Contacts, in Physical Review Letters, 111(20), 205901.
Quantitative Thermometry of Nanoscale Hot Spots
Menges F, Riel H, Stemmer A, Gotsmann B (2012), Quantitative Thermometry of Nanoscale Hot Spots, in NANO LETTERS, 12(2), 596-601.

Zusammenarbeit

Gruppe / Person Land
Formen der Zusammenarbeit
Consortium EU Project "NANOHEAT" Polen (Europa)
- vertiefter/weiterführender Austausch von Ansätzen, Methoden oder Resultaten
- Publikation
- Forschungsinfrastrukturen
- Industrie/Wirtschaft/weitere anwendungs-orientierte Zusammenarbeit
National Institute of Materials Science (Japan) Japan (Asien)
- vertiefter/weiterführender Austausch von Ansätzen, Methoden oder Resultaten
Karlsruhe Institute of Technology Deutschland (Europa)
- vertiefter/weiterführender Austausch von Ansätzen, Methoden oder Resultaten
- Publikation
- Austausch von Mitarbeitern
- Industrie/Wirtschaft/weitere anwendungs-orientierte Zusammenarbeit

Wissenschaftliche Veranstaltungen

Aktiver Beitrag

Titel Art des Beitrags Titel des Artikels oder Beitrages Datum Ort Beteiligte Personen
21st International Workshop on Thermal Investigation of ICs and Systems (Therminic 2015) Vortrag im Rahmen einer Tagung Thermometry of Self-heated Nanoscale Devices 30.09.2015 Paris, Frankreich Gotsmann Bernd; Wagner Tino;
Seminar at the Thomas Young Center Einzelvortrag Nanoscale Heat Dissipation and Thermometry 12.03.2015 London, Grossbritannien und Nordirland Gotsmann Bernd;
Seminar at the London center for Nanotechnology Einzelvortrag Nanoscale Heat Dissipation and Thermometry 11.03.2015 London, Grossbritannien und Nordirland Gotsmann Bernd;
SNI Winter School Vortrag im Rahmen einer Tagung Nanoscale heat dissipation and thermometry 22.01.2015 Blatten-Belalp, Schweiz Gotsmann Bernd;
2nd Thermal Probe Workshop Vortrag im Rahmen einer Tagung Measuring Temperature at the Nanoscale 15.01.2015 Zurich, Schweiz Stemmer Andreas; Gotsmann Bernd; Menges Fabian;
Symposium on Nanoscale Thermal Transport Vortrag im Rahmen einer Tagung Nanoscale thermometry and thermal transport on the molecular scale 10.11.2014 Chalmers, Schweden Gotsmann Bernd; Menges Fabian; Stemmer Andreas;
Eurotherm 103 "Nanoscale and Microscale Heat Transfer IV" Vortrag im Rahmen einer Tagung Keynote lecture: Nanoscale thermometry using scanning thermal microscopy 15.10.2014 Lyon, Frankreich Stemmer Andreas; Gotsmann Bernd; Menges Fabian;
International Workshop "Controlled Charge and Heat Transport at the Molecular Scale" Vortrag im Rahmen einer Tagung Length ‐ Dependent Thermal Transport Along Molecular Chains 29.09.2014 Konstanz, Deutschland Gotsmann Bernd;
7th International Conference on Molecular Electronics (Elecmol 2014) Poster Coulomb suppressed electronic transport in nanoparticle networks at room temperature 24.08.2014 Strasbourg, Frankreich Stemmer Andreas; Wagner Tino;
7th International Conference on Molecular Electronics (Elecmol 2014) Poster Graphene as bottom-contact electrode for nanoparticle arrays 24.08.2014 Strasbourg, Frankreich Stemmer Andreas; Wagner Tino;
7th International Conference on Molecular Electronics (Elecmol 2014) Poster Kelvin probe force microscopy for local characterisation of active nanoelectronic devices 24.08.2014 Strasbourg, Frankreich Wagner Tino; Stemmer Andreas;
17th International Conference on Noncontact Atomic Force Microscopy Vortrag im Rahmen einer Tagung Heat transfer at the contact of a nanotip and a surface: ballistic aspects 04.08.2014 Tsukuba, Japan Gotsmann Bernd; Stemmer Andreas; Menges Fabian;
Swiss NanoConvention Vortrag im Rahmen einer Tagung Scanning Probe Thermometry - A Thermometer for the Nanoscale 22.05.2014 Brugg, Schweiz Gotsmann Bernd; Menges Fabian; Stemmer Andreas;
Seminar: Universitaet Giessen Einzelvortrag Wärmetransport über Grenzflächen und Kontakte 19.05.2014 Giessen, Deutschland Gotsmann Bernd; Menges Fabian; Stemmer Andreas;
Seminar University of Goettingen Einzelvortrag Heat generation and dissipation in nanosystems 25.04.2014 Goettingen, Deutschland Gotsmann Bernd;
Seminar at the Technical University of Chemnitz Einzelvortrag Imaging Thermal Transport and Conversion at the Nanoscale 25.04.2014 Chemnitz, Deutschland Menges Fabian;
Seminar for ICYS at the national Institute for Materials Science, Japan Einzelvortrag Heat dissipation and thermometry in nanosystems 29.01.2014 Tsukuba, Japan Stemmer Andreas; Menges Fabian; Gotsmann Bernd;
1st Thermal Probe Workshop Vortrag im Rahmen einer Tagung Nanoscale thermal transport through a heated AFM tip 20.01.2014 Zurich, Schweiz Gotsmann Bernd; Stemmer Andreas; Menges Fabian;
Seminar at Femto-ST Einzelvortrag Heat dissipation and thermometry in nanosystems: when interfaces dominate 04.12.2013 Besancon, Frankreich Stemmer Andreas; Gotsmann Bernd; Menges Fabian;
Materials Research Society (MRS) Fall Meeting 2013 Vortrag im Rahmen einer Tagung Thermal Conductance of Self-Assembled Monolayers Using Scanning Thermal Microscopy 02.12.2013 Boston, Vereinigte Staaten von Amerika Gotsmann Bernd; Menges Fabian;
Seminar des Sonderfoschungsbereiches "Conrtolled Nanosystems" Einzelvortrag Mapping Temperature Fields and Thermal Transport in Nanosystems 15.11.2013 Konstanz, Deutschland Gotsmann Bernd; Stemmer Andreas; Menges Fabian;
12th European Conference on Molecular Electronics (ECME2013) Poster Imaging local charge transport in arrays of linked gold nanoparticles 03.09.2013 London, Grossbritannien und Nordirland Stemmer Andreas; Wagner Tino;
CECAM workshop Nanophononics Poster Nanoscale thermal imaging by scanning probe microscopy 19.08.2013 Bremen, Deutschland Gotsmann Bernd; Stemmer Andreas; Menges Fabian;
Quantitative Micro and Nano Thermal Imaging and Analysis 2013 Vortrag im Rahmen einer Tagung Imaging Thermal Transport and Conversion in Nanosystems 10.07.2013 Reims, Frankreich Stemmer Andreas; Gotsmann Bernd; Menges Fabian;
Device Research Conference 2013 Vortrag im Rahmen einer Tagung Heat dissipation and thermometry in nanosystems: when interfaces dominate 23.06.2013 South Bend, IN, Vereinigte Staaten von Amerika Menges Fabian; Gotsmann Bernd;
529th Wilhelm and Else Heraeus Seminar on „Thermal Transport on the Nanoscale“ Vortrag im Rahmen einer Tagung Local Probing of Heat Transport and Conversion in Nanosystems 07.04.2013 Bad Honnef, Deutschland, Deutschland Gotsmann Bernd; Stemmer Andreas; Menges Fabian;
4th International Workshop on Advanced Atomic Force Microscopy Techniques Vortrag im Rahmen einer Tagung Scanning Probe Thermometry in Nanosystems 04.03.2013 Karlsruhe, Deutschland Stemmer Andreas; Menges Fabian; Gotsmann Bernd;
International Meeting on Molecular Electronics (ElecMol’12) Vortrag im Rahmen einer Tagung Imaging Source-Drain Potential in Arrays of Linked Gold Nanoparticles 03.12.2012 Grenoble, Frankreich Wagner Tino; Stemmer Andreas;
31st International Conference on the Physics of Semiconductors (ICPS) Vortrag im Rahmen einer Tagung Thermal Hot Spots and Self-Heating of Nanowire Device 29.08.2012 Zuerich, Schweiz Stemmer Andreas; Menges Fabian; Gotsmann Bernd;
Phonons and Fluctuations 3 Workshop Poster Quantifying Nanoscale Hot Spots by Scanning Thermal Microscopy 21.05.2012 Sant Feliu de Guixols, Girona, Spain, Spanien Menges Fabian; Stemmer Andreas; Gotsmann Bernd;


Kommunikation mit der Öffentlichkeit

Kommunikation Titel Medien Ort Jahr
Medienarbeit: Radio, Fernsehen BBC World News Click BBC Click International 2016
Neue Medien (Web, Blogs, Podcasts, NewsFeed, usw.) IBM scientists invent a thermometer for the nanoscale IBM Research Blog International 2016
Neue Medien (Web, Blogs, Podcasts, NewsFeed, usw.) IBM Scientists Invent a Thermometer for the Nanoscale IBM Research Blog International 2016

Auszeichnungen

Titel Jahr
Swiss Physical Society, Prize related to metrology 2016
National Institute for Materials Sscience (Japan) Internship Fellowship Award for Fabian Menges 2013

Patente

Titel Datum Nummer Erfinder Eigentümer
Temperature Sensing 26.11.2014 1420993.6

Verbundene Projekte

Nummer Titel Start Förderungsinstrument
126905 Surface structuring by means of stimulated desorption of organic material 01.11.2009 Projektförderung (Abt. I-III)

Abstract

With increasing integration densities and performance improvements in microelectronics nanoscale characterization methods become important. While structural characterization is based on numerous well-established methods, thermal and electrical characterization is lacking.Local heat production limits the performance and speed that a chip can be operated at. It leads to the formation of so-called hot spots. To date there is no method readily available to test devices with sufficient precision (~10 ºC) and resolution (~10 nm) to characterize and understand such hot spots. The electrical characterization on the nanoscale is of similar relevance. In field effect transistors (FETs), for example, one of the most pressing issues today is to be able to produce highly defined doping regions. Both thermal and electrical characterization is linked to open questions of fundamental science. For example, thermal conduction in nanoscale structures is not well understood due to its complexity as essentially a non-equilibrium problem. Furthermore, in nanoscale electronic devices currently being explored, the simultaneous determination of both thermal and electronic properties during operation becomes decisive. None of the two can be understood properly without regarding the other.The proposed research project aims at solving such issues using new developments in scanned probe microscopy with a suitable electrical and thermal characterization at lateral resolutions in the nanometer range.In a first work package, a scanning thermal microscopy (SThM) setup will be developed and, for the first time, will allow measuring temperature distributions with an anticipated 10 ºC and 10 nm resolution.A second work package will bring Kelvin probe force microscopy (KFM) to a stage where local distributions of charge, surface potential and doping levels at lateral resolutions in the 1-5 nanometer range can be detected on actual devices.In a third work package, the two techniques shall be combined to give the full characterization of the same devices. This will allow determination of the respective shifts of hot-spots with respect to local potential drops and the mutual feedback of both electronic and thermal transport.
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