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"ELAN" - EUV Laser for Actinic Nano-imaging.

English title "ELAN" - EUV Laser for Actinic Nano-imaging.
Applicant Bleiner Davide
Number 133564
Funding scheme SNSF Professorships
Research institution EMPA
Institution of higher education Swiss Federal Laboratories for Materials Science and Technology - EMPA
Main discipline Plasma Physics
Start/End 01.09.2011 - 29.02.2016
Approved amount 1'433'814.00
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All Disciplines (7)

Discipline
Plasma Physics
Condensed Matter Physics
Other disciplines of Physics
Fluid Dynamics
Physical Chemistry
Technical Physics
Microelectronics. Optoelectronics

Keywords (11)

laser; photoelectron spectroscopy; nano-imaging; optical lithography; plasma; extreme ultraviolet; soft x-ray; EUV; brilliance; laboratory-scale source; free-electron laser

Lay Summary (English)

Lead
Lay summary
Short-wavelength sources, i.e. 10-50 nm (Extreme Ultraviolet) or 0.1-10 nm (soft X-rays), are enabling for a number of cutting-edge investigations such as in materials, nano/bio-imaging/spectrometry, and molecular/atomic physics. Brightness and coherence, along with wavelength tunability, are crucial source performance factors in this respect. Accelerator-based facilities, e.g. synchrotrons, xFELs, represent state-of-the-art short wavelength sources. These are however bottlenecked in terms of user accessibility and out of the plans of the industry due to their high cost-of-ownership.

The generation of hot and dense laser micro-plasmas presents the appeal of combining source performance with compactness. Laboratory-scale XUV sources are obtained either by high-harmonic generation (HHG) of an intense laser pulse in a gas jet, or by amplified spontaneous emission (ASE) across a laser-plasma column. The former leads to a broad-band spectrum that is thus utilized for femto/atto-second pulse generation, i.e. fast time-resolved diagnostics. ASE, on the other hand, leads to ultra-narrow linewidths that are thus ideal for imaging or high-resolution spectroscopy.

 The "BeAGLE" (Bern Advanced Glass Laser for Experiment) facility is a worldwide unique facility, which has demonstrated the shortest ASE wavelengths in a single-beam laboratory setup. In order to fully exploit the XUV laser characteristics, fundamental research is performed  to address issues on the in-band output and repetition rate. The former is originally attempted by investigation of cavity targets that will waveguide the ASE gain across the plasma column, thus mitigating refractive losses. The single-shot operation will be scaled-up to Hz-level exploiding an optical parametric (OP) and chirped pulse amplification (CPA) architecture.


These fundamental-science contributions have immediate implementation in actinic
("at-wavelengh") nano-imaging and surface spectroscopy. The former is crucial for enabling manufacturing of next generation integrated circuits (ICs). High volume manufacturing of sub-32-nm ICs using EUV light by means of photo-lithography, requires that the mask is a fully defect-free template. Actinic inspection at nano-scale level is possible only if laboratory at-wavelength sources are demonstrated. The combination of nano-imaging and nano-spectroscopy will lead to an integrated lab-scale morpho-chemical mapping tool.

This research program is composed of three main modules: LAPLAS (laser plasma source fundamentals), ACTINIC (nano-imaging using XUV coherent light), XULPES (XUV photoelectron spectroscopy and PEEM). Domestic and international collaboration on strategic aspects is functional to complement the portfolio of competences.
Direct link to Lay Summary Last update: 21.02.2013

Responsible applicant and co-applicants

Employees

Publications

Publication
Extreme Ultraviolet Stokesmeter for Pulsed Magneto-Optics
Ruiz-Lopez Mabel, Barbato Francesco, Ekinci Yasin, Bleiner Davide (2015), Extreme Ultraviolet Stokesmeter for Pulsed Magneto-Optics, in Photonics, 2(1), 241-255.
Optimum Pump Pulse Duration for X-Ray Ar-Plasma Lasing
Masoudnia Leili, Bleiner Davide (2015), Optimum Pump Pulse Duration for X-Ray Ar-Plasma Lasing, in Photonics, 2(1), 164-183.
Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser
Bleiner Davide, Yulin Sergiy, Martynczuk Julia, Ruiz-Lopez Mabel, Arbelo Yunieski, Balmer Jürg, Günther Detlef (2014), Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser, in Applied Optics, 53, 4894-4902.
Optimum Electron Temperature and Density for Short- Wavelength Plasma-Lasing from Nickel-like ions
Masoudnia Leili, Bleiner Davide (2014), Optimum Electron Temperature and Density for Short- Wavelength Plasma-Lasing from Nickel-like ions, in Nucl. Inst. and Meth. in Phys. Res. B, 323, 59-70.
Table-top x-ray lasers using a plasma gain-medium: limits and potentials
Bleiner Davide, Arbelo Yunieski, Masoudnia Leili, Ruiz-Lopez Mabel (2014), Table-top x-ray lasers using a plasma gain-medium: limits and potentials, in Physica Scripta, T162, 014050-014054.
Hohlraum Target for Overcoming Refractive Losses in Plasma X-ray Lasers
Masoudnia Leili, Bleiner Davide (2013), Hohlraum Target for Overcoming Refractive Losses in Plasma X-ray Lasers, in Laser Physics, 23, 056003.
Comparison of laboratory-scale XUV Laser with xFELs
Bleiner Davide (2012), Comparison of laboratory-scale XUV Laser with xFELs, in Bleiner Davide (ed.), SPIE Digital Library, Bellingham, 06.
Elemental analysis with X-ray fluorescence spectrometry
Lienemann Peter, Bleiner Davide (2012), Elemental analysis with X-ray fluorescence spectrometry, in Bleiner Davide (ed.), SPIE Digital LIbrary, Bellingham, 0D.
Extreme ultraviolet lasers: principles and potential for next-generation lithography
Balmer Jürg, Bleiner Davide, Staub Felix (2012), Extreme ultraviolet lasers: principles and potential for next-generation lithography, in Journal of Micro/Nanolithography, MEMS, and MOEMS., 11(2), 021119-3.
Introduction
Bleiner Davide (2012), Introduction, SPIE Digital Library, Bellingham.
Pulse-front tilt for short-wavelength lasing by means of traveling-wave plasma-excitation
Bleiner Davide, Feurer Thomas (2012), Pulse-front tilt for short-wavelength lasing by means of traveling-wave plasma-excitation, in Applied Optics, 51, 8848.
Saturation gain-length product during short-wavelength plasma lasing
Bleiner Davide (2012), Saturation gain-length product during short-wavelength plasma lasing, in Applied Physics Letters, 101, 081105-3.
Soft-x-ray lasing in nickel-like barium at 9.2 nm using the grazing-incidence scheme
Staub Felix, Imesch Christoph, Bleiner Davide, Balmer Jürg (2012), Soft-x-ray lasing in nickel-like barium at 9.2 nm using the grazing-incidence scheme, in Optics Communications, 285, 2118-2121.
Fundamentals of laser-ablation and laser- induced nanoparticle synthesis
Batani Dimitri, Bleiner Davide, Vinci Tommaso (2011), Fundamentals of laser-ablation and laser- induced nanoparticle synthesis, in Tamás Szörényi (ed.), Dunaujvaros, Szeged, 47-75.
Polarization measurements of plasma excited X-ray lasers
Aquila Andrew, Bleiner Davide, Balmer Juerg, Bajt Sasa (2011), Polarization measurements of plasma excited X-ray lasers, in X-RAY LASERS AND COHERENT X-RAY SOURCES: DEVELOPMENT AND APPLICATIONS IX, 8140, 0Z.
Line-Focus Generation for X-ray Laser Pumping
Staub Felix, Bleiner Davide, Jia Fei, Balmer Jürg, Line-Focus Generation for X-ray Laser Pumping, in Conference on X-ray Lasers, ParisSpringer, Berlin.
Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools
Bleiner Davide, Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools, in Conference on X-ray Lasers, ParisSpringer, Berlin.
Fourier optics study of traveling-wave excitation at short-wavelength plasma-lasing
Bleiner Davide, Feurer Thomas, Fourier optics study of traveling-wave excitation at short-wavelength plasma-lasing, in Conference on X-ray Lasers, ParisSpringer, Berlin.
Implementing the plasma-lasing potential for table-top nano-imaging
Ruiz-Lopez Mabel, Bleiner Davide, Implementing the plasma-lasing potential for table-top nano-imaging, in Applied Physics B: Lasers & Optics.
Implementing the plasma-lasing potential for table-top nano-imaging
Ruiz-Lopez Mabel, Bleiner Davide, Implementing the plasma-lasing potential for table-top nano-imaging, in Applied Physics B: Lasers and Optics.
Laser ablation and induced nano-particle synthesis
Batani Dimitri, Vinci Tommaso, Bleiner Davide, Laser ablation and induced nano-particle synthesis, in Laser and Particle Beams.
Optical correction of X-Ray Laser Illumination for Short- wavelength Microscopy
Ruiz Mabel, Staub Felix, Bleiner Davide, Optical correction of X-Ray Laser Illumination for Short- wavelength Microscopy, in Conference on X-ray Lasers, ParisSpringer, Berlin.
Plasma Homogenization for Overcoming Refractive Losses in X-ray Lasers
Masoudnia Leili, Bleiner Davide, Plasma Homogenization for Overcoming Refractive Losses in X-ray Lasers, in Conference on X-ray Lasers, ParisSpringer, Berlin.
Table-top Two-color Soft X-ray Laser by means of Ni-like Plasmas
Masoudnia Leili, Ruiz-Lopez Mabel, Bleiner Davide, Table-top Two-color Soft X-ray Laser by means of Ni-like Plasmas, in Physics of Plasmas.
X-ray lasers using a plasma gain-medium: limits and potentials
Bleiner Davide, Arbelo-Pena Yunieski, Masoudnia Leili, Ruiz-Lopez Mabel, X-ray lasers using a plasma gain-medium: limits and potentials, in Physica Scripta.

Collaboration

Group / person Country
Types of collaboration
Fraunhofer Institute Jena Germany (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
Paul Scherrer Institute Switzerland (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Publication
- Research Infrastructure
Laboratoire Optique Apliquee (ENSTA Paris Sud) France (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Exchange of personnel
Fraunhofer Institut Aachen Germany (Europe)
- in-depth/constructive exchanges on approaches, methods or results
- Research Infrastructure
Université de Bordeaux France (Europe)
- Publication
- Research Infrastructure

Scientific events

Active participation

Title Type of contribution Title of article or contribution Date Place Persons involved
Extreme Ultraviolet Symposium Talk given at a conference Concomitant surface microscopy and spectroscopy in th elab enabled by plasma-driven XUV 05.11.2015 Berlin, Germany Bleiner Davide;
Meeting COST Action "Advanced X-ray spatial and temporal metrology" Talk given at a conference PhD project updates 08.07.2015 Madrid, Spain Bleiner Davide; Arbelo-Pena Yunieski; Masoudnia Leili; Ruiz Mabel;
Erasmus IP on High Power Laser Interaction (HIPOLIN) Talk given at a conference Plasma-based Short-wavelength Lasers and related Applications 02.07.2014 Rethymnon, Greece Bleiner Davide;
COST MP1208 kick-off meeting Individual talk Short-Wavelength Plasma Radiation for Table-top Nano-Inspection 05.03.2014 Bordeaux, France Bleiner Davide;
Invitation to Fraunhofer Institut für Optik und Feinmechanik Individual talk X-ray optics for implementation in a table-top plasma-driven source 18.09.2013 Jena, Germany Bleiner Davide;
Photonica13 Talk given at a conference Short-Wavelength Plasma Radiation for Table-top Nano-Inspection 26.08.2013 Belgrade, Serbien Bleiner Davide;
Erasmus IP on High Power Laser Interaction (HIPOLIN) Talk given at a conference Plasma-based Short-wavelength Lasers and related Applications 01.07.2013 Rethymnon, Greece Masoudnia Leili; Arbelo-Pena Yunieski; Bleiner Davide; Ruiz Mabel;
International conference on X-ray Lasers Talk given at a conference Bridging the Gap Between “Proof-of-principle” and “Enabling-tool” for XUV Laser Sources. 11.06.2012 Paris, France Bleiner Davide; Masoudnia Leili; Ruiz Mabel; Staub Felix;
Symposium on Extreme Ultraviolet and Soft X-ray sources Talk given at a conference The EUV Laser Program at the University of Bern: Bridging the Gap between Tools and Applications. 07.11.2011 Dublin, Ireland Bleiner Davide;


Self-organised

Title Date Place
COST MP1203, work group 1,2 meeting 13.03.2014 Bern, Switzerland

Knowledge transfer events

Active participation

Title Type of contribution Date Place Persons involved
Senioren Universität Talk 22.10.2013 Bern, Switzerland Bleiner Davide;


Associated projects

Number Title Start Funding scheme
125275 Ignition Pulse Engineering for Enhanced Laser-Produced Plasma Light Source Performance. 01.09.2009 Project funding (Div. I-III)
169454 Table-top soft X-ray spectroscopy and excitation dynamics of photoactive molecular systems 01.10.2016 Project funding (Div. I-III)

Abstract

Hot and dense laser-produced plasmas can emit coherent radiation in the extreme ultraviolet (EUV) with excellent characteristics of monochromaticity and brilliance. In fact, the EUV laser is a photon-flux-scalable source with discrete line tunability in the entire EUV (5-50nm), high coherence and hyperfine linewidth (0.01%),with brilliance that is orders of magnitude higher than the synchrotron’s one. Such EUV lasers are even more appealing sources as their footprint is compact, and their cost much lower than homologous synchrotron or free-electron laser sources, that require national investments of years. The EUV laser is generated by IR Terawatt pulses on a solid metallic target, which induces a population-inverted plasma. The long-and-narrow plasma is indeed the laser gain medium.In order to fully exploit the EUV laser characteristics, we propose fundamental research to address issues on the yield, namely: (i) enhance the IR-to-EUV conversion efficiency, currently as low as 10^-6, and (ii)enhance the average power as related to the pulse repetition rate, currently at one shot in several minutes. The former is originally attempted by investigation of cavity targets that will work as plasma traps, thus mitigating losses and moving towards high duty cycle. These fundamental contributions have immediate implementation in fast chip technology, such as actinic (at-wavelength) nano-imaging, or high-resolution photoelectron spectroscopy. The combination of the two will lead to lab-scale chemical nano-imaging. This proposal aims to secure support for accomplishing the technological revolution from ”proof-of-concept” EUV source to enablinguser-facility.
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