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Optimisation of roughness and interdiffusion of sputtered multilayer systems

English title Optimisation of roughness and interdiffusion of sputtered multilayer systems
Applicant Stahn Jochen
Number 101567
Funding scheme Project funding (Div. I-III)
Research institution Paul Scherrer Institut
Institution of higher education ETH Zurich - ETHZ
Main discipline Condensed Matter Physics
Start/End 01.10.2003 - 30.09.2006
Approved amount 149'191.00
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Keywords (4)

Multilayer; Sputtering; Neutron mirrors; Super mirrors

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Name Institute

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